SPCC 2016 Technical Program

Day 1 — Tuesday April 19

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Session1: Emerging Technologies for 10 and 7nm

Session 2: Contamination Control

Session 3: Advanced Etch

Day 2 — Wednesday, April 20

Session 4: ITRS/SurfacePassivation

Session 5

Session 6: Contamination Free Manufacturing

Session 6: Panel Discussion — The Future of Formulated Chemistries

Posters